摘要
用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上制备了SrBi3.88Nd0.12Ti4O15铁电薄膜材料,研究了退火温度和匀胶速率对铁电薄膜材料结构、铁电性能的影响。退火温度为750℃、匀胶速率为3000r/min薄膜样品为纯的铋层状钙钛矿结构且没有其它杂相出现,a轴取向的晶粒较多,铁电性能较好,剩余极化强度和矫顽场分别为2Pr=26.7μC/cm2、2Ec=80kV/cm。
Neodymium-doped strontium bismuth titanate （SrBi3.88Nd0.12Ti4O15, SNBT-0.12） thin films were prepared on Pt/Ti/SiO2/Si substrates by sol-gel method. Annealing temperature and spin-coating speed of the films on microstructure, growth behavior and ferroelectric properties of SNBT-0.12 films were investigated. The X-ray diffraction （XRD） patterns exhibited that no secondary phase （such as pyrochlore phase） could be found indicating that a pure SNBT-0.12 perovskite phase was obtained in the sample annealed at 750 ℃. The SNBT-0.12 film is preferred orientation growth along a-axis at the spin-coating speed of 3000 r/min （annealed at 750 ℃）. The film show good hystereais loop with remnant polarization （2Pr） and coercive field （2Ec） of 26.7 μC/cm^2 and 80 kV/cm, respectively.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2009年第A02期260-262,共3页
Rare Metal Materials and Engineering
基金
国家自然科学基金项目(50872075)
山东省自然科学基金项目(Y2007F36)
关键词
退火温度
匀胶速率
铁电性能
annealing temperature
spin-coating speed
ferroelectric properties
