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静电悬浮转子微陀螺微位移数字化电容检测通道设计

Design of digital capacitive micro-displacement sensing channel for micromachined electrostatically suspended gyroscope
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摘要 微位移检测是实现静电悬浮转子微陀螺闭环起支和稳定悬浮控制的重要前提。针对微陀螺轴向起支和悬浮的检测要求、特点及主要技术指标,设计了完整的电容式微位移检测通道。该通道主要由前置C/V转换、差动放大、四阶压控电压源有源带通滤波、相敏解调、四阶Butterworth低通滤波和16位A/D转换等环节组成,具有激励带宽大、检测精度高及数字化输出等特点。试验表明,检测通道的灵敏度为1.4V/pF,线性度为2.11%,微位移检测分辨力优于10nm,能够满足微陀螺轴向起支和稳定悬浮的检测要求。 Micro-displacement sensing is an essential premise for realizing the closed-loop initial levitation and steady suspension control of micromachined electrostatically suspended gyroscope (MESG). According to the sensing requirements, characteristics and main specifications of the axial initial and steady suspension of the MESG, a complete capacitive micro-displacement sensing channel is designed and implemented. Characterized by wide stimulation band, high sensing precision and digital output, this channel is primarily composed of prepositive C/V converter, differential amplifier, fourth-order Voltage Controlled Voltage Source (VCVS) active Band Pass Filter (BPF), phase sensitive demodulator, fourth-order Butterworth Low Pass Filter (LPF), 16-bit A/D converter and so on. The static calibration results show that the sensitivity and nonlinearity of the sensing channel are 1.4 V/pF and 2.11% respectively, and the micro-displacement resolution is lower than 10 nm, and can meet the micro-displacement sensing requirements for the initial and steady axial suspension control.
出处 《中国惯性技术学报》 EI CSCD 北大核心 2009年第6期734-737,共4页 Journal of Chinese Inertial Technology
基金 国家"十一五"预研基金(51030950806) 武器装备预研基金(9140A09020706JW0314)
关键词 微陀螺 静电悬浮 微位移 电容检测 micromachined gyro electrostatic suspension micro-displacement capacitive sensor
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参考文献8

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