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气动膜片式微滴喷射系统原理与实验 被引量:10

Theoretical and experimental study on pneumatically actuater diaphragm-driven micro-droplet jetting system
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摘要 利用压电式微滴喷射技术驱动力传递路径短、驱动可控和气压直接驱动微滴喷射耐高温的优点,提出了一种气动膜片式微滴喷射技术.以压缩气体为驱动源,膜片为驱动部件,通过电磁阀通断控制流体形成射流,并使射流颈缩分离形成微滴.以无粘性流体伯努利方程和粘性流体动量守恒方程为基础,建立了微滴喷射过程的数学模型.以气动膜片式微滴喷射装置对焊料进行微滴喷射实验,得到了直径偏差在3%以内的焊球.在喷嘴孔径为80μm和100μm的情况下,分别获得最小直径为85μm和105.3μm的金属焊球. Aimed at the system's working on high temperature for molten metal and other materials, a pneumatically-actuator diaphragm-driven drop-on-demand micro-drop generator was proposed, after the merits of piezoelectric-driven method and pneumatic-driven methods were combined. The apparatus consists of five parts: a throttle, a solder reservoir, a diaphragm, a vent hole and a dispensing nozzle. Derived from Bernoulli's equation, when viscous effects are not important, or from the general integral momentum balance, when viscous effects are important, a mathematical model of jetting process was developed also. Using the home-made micro-drop generator, uniform micro droplets with diameter variation less than 3 % was obtained. Ideal micro solder ball of 85 μm and 105.3 μm in diameter were ejected from micro nozzle of 80μm and 100 μm in diameter respectively.
出处 《华中科技大学学报(自然科学版)》 EI CAS CSCD 北大核心 2009年第12期100-103,共4页 Journal of Huazhong University of Science and Technology(Natural Science Edition)
基金 国家自然科学基金资助项目(50775087)
关键词 封装 焊料 微滴生成 微滴喷射技术 气动膜片式 按需喷射 packaging solders drop formation micro-jetting technotogy pneumatically actuator diaphragm-driven drop-on-demand
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参考文献16

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