摘要
微机电系统是指融合了硅微加工,光刻成型和精度机械加工等多种微加工技术制作的微传感器、微执行器和微系统。MMA7260Q是飞思卡尔推出的一款微型电容式三轴加速度传感器,内部采用了信号调理、单极低通滤波器和温度补偿技术,可以采集震动产生的加速度在三坐标中的各个分量。三轴加速度传感器MMA7260Q与嵌入式计算机组成测量节点,各节点由CAN总线组成分布式检测网络,完成矿震的监测、震源的定位和趋势分析。使监测灵敏度、定位精度、传感器可靠性有了很大的提高。
MEMS are the micro-sensor, micro-actuator and micro-system produced by the micro-machining technology which fuses the silicon micro-machining, molding and precision lithography and so on. MMA7260Q is Freescale＇s miniature triaxial accel- erometer capacitance sensor, which uses the technologies of signal conditioning, the single low-pass filter and temperature compensation, can get the various components of mining earthquake in the 3D acceleration, and then the determination of the linear space is achieved. Triaxial acceleromcter MMA7260Q and embedded computer component measurement node, each node is composed by the CAN bus distributed detection network, and completes mining earthquake monitoring, the source location and trend analysis.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期410-412,共3页
Instrument Technique and Sensor
