摘要
为分析石英晶体横向场激励(lateral-field-excitation,LFE)压电传感器的频率温度特性,文中在厚度场激励(Thick-field-excitation,TFE)压电传感器计算频率温度系数方法基础上,增加一个电场方向的自由度,推导计算LFE压电传感器频率温度系数的公式,并使用该公式计算常用Y旋转切石英晶体横向场激励传感器的一阶、二阶和三阶温度系数,并将其与不考虑压电效应、厚度场激励的2种情况进行比较。通过计算发现,石英晶体在3种不同情况下的频率温度特性曲线基本重合,AT切和BT切石英晶体LFE压电传感器具有零温度系数。
In order to study the frequency-temperature characteristics of quartz LFE piezoelectric sensors, this paper introduced electric field angle to the frequency-temperature coefficient calculation method of TFE piezoelectric sensors, and deduced the calculation formula of frequency-temperature coefficient for LFE piezoelectric sensors. With this formula, the first, second and third frequency-temperature coefficients of Y rotated cut quartz LFE piezoelectric sensors were calculated, and compared to the coefficients of quartz neglecting piezoelectricity and quartz rITE piezoelectric sensors. The frequency-temperature coefficient curves of quartz LFE piezoelectric sensors in three different conditions are almost uniform. The AT and BT cut quartz LFE piezoelectric sensors also have zero frequency-temperature coefficients.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期25-27,共3页
Instrument Technique and Sensor
基金
深圳市“双百人才”计划
关键词
石英
横向场激励
压电传感器
频率温度特性
quartz
lateral-field-excitation
piezoelectric sensor
frequency-temperature characteristics
