3KUSSUL E M, RACHKOVSKIJ D A, BAIDYK T N, et al. Micromechanical Engineering: a Basis for the LowCost Manufacturing of Mechanical Microdevices Using Microequipment [ J ]. Journal of Micromechanics and Microengineering, 1996 (6): 410 ～ 425. 被引量：1
4VOGLER M P, LIU X Y, KAPOOR S G, et al. Development of Meso - scale Machine Tool (mMT) Systems[J]. Transaction of NAMRI/SME, 2002,30:653 ～ 66. 被引量：1
5DUTTA K, DEV P, DEWILDE P, et al. Integrated Micromotor Concepts[M]. Proc. ICMCST, 1970.36～37. 被引量：1
6KITAHARA T, Y ISHIKAWA, TERADA T, et al. Development of Micro - lathe [ J ]. Journal of Mechanical Engineering Laboratory, 1996,50( 5 ): 117 - 123. 被引量：1
7LU Z, YONEYAMA T. Micro cutting in the micro lathe turning system [ J ]. International Journal of Machine Tools & Manufacture, 1999,39:1171 ～ 1183. 被引量：1
