摘要
提出了一种用激光干涉仪测量三坐标测量机动态误差的方法，分析了激光干涉仪的测量原理并分别对扫描测量和触发测量中的动态误差进行了模拟测量．实验结果表明，运动中的加速度产生的附加惯性力是产生动态误差的重要因素．由于惯性的原因，扫描测量中换向时产生的误差大约是同样条件下惯性力造成误差的２倍．
A method of measuring the dynamic errors of CMMs with a laser interferometer is given in this paper.The working principle of the laser interferometer is analyzed and the dynamic errors are measured in the scanning probing and touch trigger probing respectively.The results show that acceleration force is the significant factor causing dynamic errors.When the probe changes its direction in the scanning measurement the error is about twice as much as that caused by the same acceleration force due to the influence of inertia.
出处
《天津大学学报》
EI
CAS
CSCD
1998年第5期621-626,共6页
Journal of Tianjin University(Science and Technology)
基金
天津市科委21世纪青年科学基金
关键词
激光干涉仪
三坐标测量机
动态误差
动态特性
laser interferometer,coordinate measuring machine (CMM),dynamic error,scanning probing,touch trigger probing
