摘要
介绍了外径为02mm的超微型压力传感器芯片设计与结构封装。该微型传感器已成功用于空气动力学试验及生物医学，在高精度的流体动力学测试中，如风洞测试系统中，要求传感器不仅具有良好的动态特性，而且为了减少对测量流场的影响，提高测量的精度，对传感器的尺寸要求更加小型化。
The design and package of super-miniature pressure sensor which our diameter only 2mm is introduced . This transducer repeat the change law of fluid field under the condition of not disturbing the state of fluid field in its original position or location based on the limit of in- stalling position. This sensor has successfully used in aerodynamics research, wind tunnel experiment, biomedicine application and many scientif- ic research.
出处
《计测技术》
2009年第B09期29-30,共2页
Metrology & Measurement Technology
关键词
超微型
原位测量
微电子机械技术
super-miniature
original position measurement
MEMS
