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高压法微小电容检测 被引量:16

Inspection of low capacitance by high voltage method
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摘要 微小电容测量电路广泛应用于各种工业过程中,尤其是在用于电容层析成像系统中。大多数的微小电容测量电路采用了基于交流电流测量或直流充放电方法。这些方法的共同优点是具有较高的灵敏度和抗杂散电容能力。而且其交流激励电压或直流充放电电压一般在20V以下。为进一步提高微小电容测量的灵敏度和分辨力,本文提出了一种高压交流激励方式电路,该电路将交流激励电压提高到几百至上千伏。实验表明该方法大大提高了微小电容测量的灵敏度和分辨力,同时具有良好的稳定性和线性度。 Low capacitance measurement circuit is involved in many industrial applications. Most of the low capacitance measurement circuit uses AC-based method or charge/discharge method because of high sensitivity, high resolution and stray immune; and its excitation or charge voltage are not more than 20 V. To improve the sensitivity and the resolution further, a high voltage AC-based method is proposed. The excitation voltage of the new method can be regulated from several hundred up to one thousand volts. The new measurement circuit is tested in laboratory, and the experimental results show that the sensitivity and the resolution are greatly improved, at the same time, the linearity and the stability are favorable.
出处 《仪器仪表学报》 EI CAS CSCD 北大核心 2009年第7期1448-1451,共4页 Chinese Journal of Scientific Instrument
基金 国家自然科学基金(60374052)资助项目
关键词 高压激励 微小电容测量 电容层析成像 high excitation voltage low capacitance measurement electrical capacitance tomography
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参考文献9

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二级引证文献75

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