摘要
提出了一种新型的双轴电容式微机械加速度计的结构形式。采用1个质量块敏感2个正交方向的加速度,设计的弹性支撑结构巧妙地实现了正交方向的解耦,且结构稳定性好。详细讨论了该加速度计的工作原理,并利用有限元软件对敏感结构进行了静态和模态分析,从理论上验证了所提出的双轴电容式微机械加速度计整体结构的可行性。
A novel structure of dual-axis capacitive micromachined accelerometer is introduced. A proof mass is sensitive to two orthogonal accelerations. The full symmetry structure with comb fingers makes cleverly the decoupling of two orthogonal accelerations and has high stability. After discussing the work principle of this element, the modality and static analysis are used by ANSYS. The results show that the structure can fulfill the design demands in theory.
出处
《传感器与微系统》
CSCD
北大核心
2009年第7期71-73,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(60574093
60871037)
