摘要
针对传统微电容测量技术存在的缺点,根据参比电容和锁定放大技术的微电容测量原理,研制出1种微电容测量仪.该微电容测量仪采用参比测量技术,用锁定放大技术对测量系统的噪声进行抑制.试验表明采用参比测量技术使测量结果不受激励电压波形和幅度影响.该微电容测量仪的最小测量量程达到0.1 pF,其微电容测量电路已申请发明专利.
In view of the disadvantages of the conventional technology of measuring the low capacitance, a kind of low capacitance measurer is proposed according to the principle of the reference capacitance and lock-in amplifier technologies of measuring the low capacitance. Applying the technology of the reference measuring, the noise of the measuring system is suppressed by the lock-in amplifier technology in this measurer. The tests show that the test results are free from the wave shape and amplitude of driving voltage, and the minimal measuring range is O. 1 pF. The low capacitance measuring circuit of this measurer has been applied for a national patent of invention.
出处
《上海海事大学学报》
北大核心
2009年第2期25-28,71,共5页
Journal of Shanghai Maritime University
关键词
微电容测量
锁定放大
参比电容
噪声抑制
low capacitance measuring
lock-in amplification
reference capacitance
noise suppressing
