摘要
基于差动光程差倍增法将微小位移转化为多倍光程差,通过电桥光电转换电路,得到干涉条纹数的变化.采用差动干涉方法,提高了光程改变量与位移量的比例,使微小位移的测量精度提高到亚微米量级.
Based on differential optical path difference multiplication, the micro-displacement is transferred into multiplied optical path difference. The micro-displacement can be measured from the change of the number of interference patterns, which can be detected by photoelectric detector using an electrical bridge. The proportion of the change of optical path difference and micro-displacement is improved by this method, and the accuracy of micro-displacement reaches submicron level.
出处
《物理实验》
北大核心
2009年第6期8-10,14,共4页
Physics Experimentation
关键词
光程差倍增
差动干涉
电桥
optical path difference multiplication
differential interference
electrical bridge
