摘要
研究了Link公司能谱仪中RTS软件（薄膜定量分析软件）可靠性及适用性。实验结果表明：RTS软件定量分析结果误差较小。但对C、N、O等轻元素定量分析，试样厚度小于1500以下时，结果才比较可靠。
The present work examines the reliability and suitability of software for quantitative electron microanalysis of thin sections (it is RTS software) using Exl type single window energy dispersive X-ray (EDX) detector. It is found that the error of quantitative analysis is less for the RTS software,but only if the thickness of specimen is less than 1500A,the quantitative analysis result using RTS software is reliability for light elements such as C,N,O element.
出处
《钢铁研究》
CAS
1998年第3期43-47,共5页
Research on Iron and Steel
关键词
薄膜
定量分析
误差
能谱
化学分析
thin section quantitaive analysis error energy disperscie X-ray
