摘要
为实现小口径干涉仪完成较大口径光学平面镜片的测试,得到镜片的完整面形信息,提出了基于标记点的平面Givens变换,实现了子孔径的精确定位。采用Zernike多项式拟合对每个子孔径数据进行了消倾斜量的处理。建立了全局优化拼接数学模型。利用该模型进行了九孔径拼接计算机仿真实验,利用该方法得到的PV值和RMS值的相对误差均在10-6左右。对直径为150mm的镜片进行九孔径拼接检测实验,对比全口径干涉检测结果,PV值和RMS值的相对误差为0.36%和2.27%。仿真和实验结果证明:该方法稳定可靠,降低了传统的子孔径拼接干涉检测方法中对导轨的高精度要求。
In order to obtain the whole lens＇ surface information, measurement of larger diameter optical plane was implemented by using smaller caliber interferometer. The problem of precise location was solved by the plane Givens transform of markers＇ position. Each sub-aperture＇s tilt and piston were removed by Zernike polynomial fitting. Global optimization stitching model was established. Nine sub-apertures stitching computer simulation was accomplished by using the model. The relative error values ofPVand RMS are both about 10-6. A lens of 150 mm in diameter was used in nine sub-apertures stitching experiment. Compared with full caliber interference meastti＇ement results, the relative error value of PV is 0.36% and the relative error value of RMS is 2.27%. Simulation and experimental results indicate that the algorithm reduces the requirements of high precision rail in traditional sub-aperture stitching interference measurement.
出处
《光电工程》
CAS
CSCD
北大核心
2009年第5期83-87,共5页
Opto-Electronic Engineering
基金
国家863高技术资助项目
关键词
子孔径
干涉检测
全局优化
拼接技术
sub-aperture
interference measurement
global optimization
stitching technology
