摘要
通过对多晶硅切割液工艺的改进及废液的回收,带来了产量的增加,排放降低和成本下降导致项目经济效益增长。
Through the polysilicon Cutting liquid process improvement and waste water recovery , output of product was increased, emissions was reduced, good economic benefit was gained.
出处
《辽宁化工》
CAS
2009年第5期333-334,共2页
Liaoning Chemical Industry
关键词
工艺
消化
经济效益
Process
Digestion
Economic benefit
