摘要
针对高速钢刀具热阴极等离子镀TiN涂层工艺参数进行试验研究,并对涂层刀具的性能进行了分析.结果表明,当Ti蒸发率在0.23~0.28g/min时,上、下位各镀45min,涂层厚度控制在2μm±20%范围内,TiN结构呈(111)晶面择优取向,结合强度好;工件温度影响膜的生长,不同类型的刀具对加热时间及基体温度要求不同.
Optimum technology of high speed steel tools with TiN coatings deposited by hot cathode deposition is experimentally studied, and its performance is analysised. The test results indicate that TiN has the apparent preferred orientation(111) and high adhesive strength when it is coated both upper and down for 45 minutes with the vaporization rate of titanium being 0.23 g to 0.28 g per minute and the thickness of coatings being controlled within 2 μm±20%. As the temperature of workpiece influences the film growth, various kinds of tools have different demands of substrate temperature.
出处
《江苏理工大学学报(自然科学版)》
1998年第3期58-61,共4页
Journal of Jiangsu University of Science and Technology(Natural Science)