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纳米级动态粘着接触的有限元模型与仿真 被引量:1

Finite Element Modeling and Simulation of Dynamic Adhesive Contact on Nano Scale
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摘要 对纳米级动态粘着接触过程进行仿真,是为了研究微纳米尺度的机电系统(如MEMS)中所存在的纳米级表面接触和摩擦,对系统进行减粘附设计。利用商用有限元分析软件ANSYS建立的纳米尺度的动态粘着接触模型,采用原子间Len-nard-Jones作用势函数来描述表面力,用数值求解的方法来描述基本球-盘模型的接触-分离行为,最终得到接触过程的力-位移曲线和粘着接触的分离点和粘着力的大小。将有限元粘着接触模型仿真所得结果与常用的接触模型(DMT模型、JKR模型)解析解对比,证明了有限元粘着接触模型的适用性。由于有限元模型不受接触副几何形状和材料性质的限制,可以进一步对表面形貌修饰后的粘性接触过程和多峰粘着接触过程进行仿真。 A dynamic adhesive contact model on nano scale is developed to deal with the inevitable behaviors of contact and friction in electro mechanical systems which are ranged on micro or nano scale, such as MEMS. The model can be used for tribological design to reduce adhesion during the development of micro or nano mechanical products. A dynamic adhesive contact model on nano scale is cast into an efficient finite element simulation which is implemented using the commercial FEA( finite element analysis) software ANSYS. The interatomic interaction Len- nard- Jones potential is adopted to describe surface force, and numerical solution method is used to describe the process of approach and separation of a sphere and a flat which represents a fundamental contact problem. The proposed adhesive contact model is validated by a comparison with the commonly quoted analytical JKR and DMT models. The model can be further developed into simulation of adhesive contact processes with patterned surfaces or multi -asperities due to no restrictions to geometrical shape and material property for finite element model.
作者 刘媛 张向军
出处 《计算机仿真》 CSCD 北大核心 2009年第4期116-119,共4页 Computer Simulation
基金 自然科学基金(50575123 50730007) 长江学者和创新团队发展计划(IRT0508)
关键词 微纳米机电系统 粘着接触 有限元法 MEMS/NEMS Adhesive contact FEM
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参考文献9

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