摘要
纳米科学技术是具有广阔应用前景的面向２１世纪的一门新技术，广泛涉及到材料学、机械学、电子学等各个领域。通过介绍纳米科学技术的特点及其在现代微传感器上的应用现状的同时，重点分析国外几种典型现代微传感器的结构方案和工作原理，并对现代微传感器的几种制作技术及工艺作了比较详细的分析。
Nano technology,a new branch of science,has a bright prospect and can meet the demands of the 21st century.This technology concerns material science,mechanics and eletronics.The paper presents the features of nano technology and its application in micro sensors.Emphaticall,the typical schemes of micro sensors developed in foreign countries are introduced.An analysis for the principles and manufacturing techniques is also given.
出处
《桂林电子工业学院学报》
1998年第1期64-68,共5页
Journal of Guilin Institute of Electronic Technology
关键词
纳米科学技术
微传感器
微细加工
陀螺仪
nano science and technology,micro sensor,microfabrication,gyroscopes,accelerometers,corroding,bonding
