摘要
本文利用X射线衍射技术表征了磁控溅射Pt薄膜的纤维织构.并给出了一种表征薄膜纤维织构的一般性方法.研究结果表明,利用X射线衍射的特殊扫描方式可以实现薄膜纤维织构的定量和定性表征.对于制备态Pt薄膜而言,织构漫散;400℃退火后,薄膜{111}型纤维织构变强,表明Pt薄膜的强{111}织构系退火时薄膜的再结晶所致.
The fiber type texture of Pt film prepared by magnetron sputtering method was studied, and a method for the characterization of the film fiber texture was presented. The results indicate that the fiber texture in films can be characterized using the special X-ray diffraction technique. The texture in as-sputtered Pt film is diffused. After annealing at 400 C for 5 min, the texture degree of the film becomes very strong. Therefore, the highly fiber tex- ture in annealed Pt film is considered as the result of the recrystallization during the annealing process.
出处
《南京大学学报（自然科学版）》
CAS
CSCD
北大核心
2009年第2期135-138,共4页
Journal of Nanjing University（Natural Science）
关键词
薄膜
PT
织构
X射线衍射
film, Pt, texture, X-ray diffraction
