摘要
采用磁控溅射的方法,在玻璃基片上制作出SnO2-Cu-SnO2-Cu-SnO2的5层式多层复合薄膜。并且在常温下使用分光光度计检测出,当它接触到酒精和丙酮气氛的情况下,其反射率在可见光范围的某些波段有变化,气敏特性与纯SnO2薄膜的相似,同时具有更佳的反应效果。
The Cu -doped thin films with SnO2 -Cu -SnO2 -Cu -SnO2 structure are deposited on glass film by using magnetron sputtering system. Their reflectance spectra in visible range will change when they are place in the ethanol or acetone atmosphere at room temperature. Their gas -sensitive properties are similar to the pure SnO2 thin but with higher sensitivity.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2009年第2期120-124,共5页
Journal of Functional Materials and Devices
关键词
磁控溅射
SNO2
反射率
magnetron sputtering
SnO2
reflectance
