摘要
金刚石具有许多优异的性能，但天然金刚石的价格也比较昂贵。金刚石薄膜的各种性质与天然金刚石几乎相同，具有非常广阔的工业前景。本文采用乙醇和氢气作为工作气源，利用微波等离子体化学气相沉积法，在较低的温度下制备了金刚石薄膜，并研究了反应气压对金刚石薄膜生长的影响。
Diamond has some outstanding semiconductor properties. But the diamond price has affected its application. Research shows that the diamond film is the same as the natural diamond and possesses many industrial applications. Diamond films have been prepared from ethanol and hydrogen using microwave plasma CVD at a lower substrate temperature.
出处
《贵州科技工程职业学院学报》
2009年第1期9-11,共3页
GUIZHOU SCIENCE AND TECHNOLOGY PROFESSIONAL COLLEGE
关键词
微波等离子
化学气相沉积
金刚石薄膜
乙醇
microwave plasma
chemistry vapor deposition
diamond film
ethanol
