Control of arsenic Pollution from waste gases during fabrication of semiconductor 被引量：1

Control of arsenic Pollution from waste gases during fabrication of semiconductor

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摘要 The abatement technology of toxic arsenic pollution during fabrication of semiconductormaterials and devices has been studied. The abatement technology of toxic arsenic pollution during fabrication of semiconductormaterials and devices has been studied.

作者 Wen Ruimei Liang Junwu Deng Lisheng Peng Yongqing(Institute of Semiconductors, Chinese Academy of Sciences Beijing 100083,China)

出处《Journal of Environmental Sciences》 SCIE EI CAS CSCD 1994年第1期123-127,共5页 环境科学学报（英文版）

关键词 Semiconductoro ARSENIC POLLUTION abatement. Semiconductoro, arsenic, pollution, abatement.

分类号 X760.1 [环境科学与工程—环境工程]

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1Hui ZHANG.Groundwater arsenic pollution from Inner Mongolia and evidence of its occurrence[J].Chinese Journal Of Geochemistry,2006,25(B08):9-10.
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10Chen Yuxiang,Wang Xuehai,Liu Zhongsheng,Wang Xin (Fushun Research Institute of Petroleum and Petrochemicals,SINOPEC,Fushun 113001).Commercial Application of Technology for Catalytic Combustion of Waste Gases from Wastewater Treatment System in Petrochemical Enterprises[J].China Petroleum Processing & Petrochemical Technology,2009,11(3):29-32. 被引量：1

Journal of Environmental Sciences

1994年第1期

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Control of arsenic Pollution from waste gases during fabrication of semiconductor 被引量：1

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