摘要
采用有限元方法,借建立微机械气流式全方位水平姿态传感器敏感元件的三维模型,计算了热敏电阻在不同排列方式和不同倾斜状态下,敏感元件内温度场和流场的分布。结果表明:当两两相对的检测热敏电阻之间的距离d改变时,温度场和流场都发生变化;两两相对的检测热敏电阻处气流速度之差?v与倾角关系曲线也随d发生变化。其中,d为900μm是热敏电阻的最佳排列方式。
With the method of FEA （finite element analysis）, the distributions of temperature field and flow field in sense organ at different arrangements of hot-resistances and different tilting states, were obtained by building the three-dimensional model of micromachined airflow omnibearing level posture sensor＇s sense organ.The results are as follows： the temperature field and flow field change with d （d is the distance of two detection hot-resistances that is parallel face to face）; the airflow velocity difference Av of two hot-resistances and tilt-angle relation curve change with d, too. And the best arrangement of the hot-resistances is d = 900 μm.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2009年第4期24-26,33,共4页
Electronic Components And Materials
基金
国家自然科学基金资助项目(No.60772012)
北京市教委科技发展面上资助项目(No.KM00710772009)
北京市优秀人才培养计划资助项目
北京市传感器重点实验室资助项目
北京市属市管高校人才强教计划资助项目
关键词
全方位水平姿态
流场
温度场
灵敏度
传感器
omnibearing level posture
flow field
temperature field
sensitivity
sensor
