摘要
利用溶胶-凝胶法制作了平板波导.实验中,在不同的条件下采用溶胶-凝胶法在玻璃衬底上制备出TiO2平板波导,分析了影响平板波导的因素,如溶胶-凝胶溶液的浓度、pH值,滴胶速度,热处理等.并对在不同工艺条件下的波导膜特性进行了测试,分析了影响波导膜质量的各个因素.实验表明,在控制实验条件的前提下溶胶-凝胶法在制作平板波导膜的工艺上制作方法简单,容易实现.
Using sol-gel coating method, TiO2 plane waveguides were fabricated on glass substrates under different conditions. Many factors that can influence the quality of the plane waveguide, such as the concentrations of sol-gel solutions,the pH value of the solutions,the dripping speed of the sol-gel drop,the heating process and so on,were analyzed. The characteristics of plane waveguides under different operating conditions were tested. The factors affecting the quality of the plane waveguide were analyzed. The experimental results show that the sol-gel coating method is a simple way to fabricate high quality plane waveguide under carefully controlling of the conditions.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2009年第3期561-565,共5页
Acta Photonica Sinica
基金
黑龙江省自然科学基金(A0308)资助
关键词
平板波导
制作
溶胶-凝胶
Plane waveguide
Fabrication
Sol-gel coating
