摘要
从哈特曼法自动测量像差所需解决的准直(平行)光束出发,基于高斯光学理论,从工程角度分析了大倍率准直扩束系统的原理,实现了改变激光光束直径和发散角的准直扩束系统的设计,并通过仿真得到了验证,满足了光学系统的哈特曼像差测量要求。
Through breathes out Hartmann spherical-aberration automatic measurement collimation which resolved collimated （parallel） beam of departure, based on the Gaussian optics theory, Analyse the large collimated beam expander magnification Principle through the project angleo Achieve a change in laser beam diameter and divergence angle of the beam expander collimator system design, and has been verified through the simulation to meet the optical system aberration measurement requirements Hartmann spherical-aberration measurement.
出处
《装备制造技术》
2009年第3期28-31,共4页
Equipment Manufacturing Technology
基金
武汉市属高校2006年科学研究项目(武汉教高[2006]5号)
关键词
光学测量
激光器
准直扩束
Optical Measurement
Lasers
Collimated Beam Expander
