摘要
设计了一种耐高温(400℃)、抗过载(20000gn)的SOI微加速度传感器的结构,介绍了传感器的制作工艺,并应用ANSYS软件对其进行了仿真,讨论了传感器的量程、抗冲击能力、灵敏度、横向灵敏度、线性度等各项指标,证明该微传感器满足了设计时所提出的要求。
A sort of SOI micro-acceleration sensor which can endure high temperature （400℃） and overload （20000 gn）are designed, the manufacture and technique of its are introduced, emulation is carried on applying ANSYS. The range, ability to endure impact, sensitivity, sensitivity of landscape orientation, linearity of the sensor are discussed, the results prove the sensor can satisfy the request which is put forward when being designed.
出处
《传感器与微系统》
CSCD
北大核心
2009年第3期73-76,共4页
Transducer and Microsystem Technologies
关键词
高温
抗过载
抗冲击
微加速度传感器
high temperature
overload resisitance
impact resistance
micro-acceleration sensor
