摘要
采用直流反应磁控溅射工艺,进行了一系列在PET塑料薄膜表面沉积氧化铝的实验,研究了氩气(Ar)、氧气(O2)和溅射功率对所制备的Al2O3薄膜透氧率和透湿率的影响。实验表明,当氩气流量为90sccm、氧气流量为10sccm、溅射功率为600W时,Al2O3薄膜的透氧率为2.11cm3/(m2×atm×24h),透湿率为0.58g/(m2×atm×24h),此时薄膜阻隔性能最好。
Carried out a set of Al2O3 deposition experiments using DC reactive magnetron sputtering technology on the surface of PET plastic film, and studied on the influence of Ar, O2 and sputtering power on permeation rate of oxygen and water vapor. And the results shows that the barrier properties are the best and the permeation rate of Ar and 02 are 2.11 cm^3/ （m^2×atm×24h）and 0.58g/（m^2 × atm × 24h） respectively, when the flux of Ar and O2 are 90sccm and 10sccm, respectively, and sputtering power is 600W.
出处
《中国印刷与包装研究》
CAS
2009年第1期92-96,共5页
China Printing Materials Market
基金
国家“十一五”科技支撑计划资助(2006BAD05A05)
关键词
磁控溅射
氧化铝薄膜
阻隔性
Magnetron Sputtering
Al2O3
Barrier Property
