摘要
本文以标量散射理论为基础,用概率统计方法建立了粗糙表面的光散射强度在傅氏透镜后焦面上的分布的理论模型,采用镜反射方向的光强与某一散射方向的光强之比来计算R_q值的方法,导出了理论计算公式。实验中以CCD作为光强检测元件,采用微机系统来实现数据采集与处理,并将其结果同轮廓仪测得值进行了比较。从而证明了理论模型的正确性和在加工中进行现场测量的可行性。
Based on the scalar scattering theory,a mathematical model of the light scattering intensity distribution of laser beam on the back focal plane of Fourier lens by a rough surface is established by means of the probabilistic-statistical method.The theoretical formula for calculating the roughness parameter rms(Rq)by using the light intensity ratio of the specular to an angular direction is derived.In the experiment,using CCD as detector,the data are collected and processed by a microcomputer system.The results are compared with the values obtained by the profilometer.The experiment proves the correctness of the theoretical model and the feasibility of online measurements while the workpieces are being machined or formed.
出处
《计量学报》
CSCD
1990年第2期81-85,共5页
Acta Metrologica Sinica
基金
高等学校科学技术基金
