摘要
利用计算机仿真技术，成功地编制出一套计算机软件，深入探讨了压电微电机优化理论，探明了压电微电机压电体材料属性、定子基衬底和弹性体的比刚度、定子各部分结构尺寸对能量输出效率的影响规律，并建议性地给出了压电微电机各部分的优选材料、结构尺寸等。实验表明，该分析方法的应用确有助于提高压电微电机的能量输出。
By computer simulation, computer software was developed successfully so that the optimization principle of the piezoelectric micromotor was analyzed in depth. This work showed that the piezoelectric element's material characteristics, the stiffness of the matrix and elastomer in the stator , the structure size of all parts of the stator will influence the efficiency of piezoelectric micromotors. The optimal material and structure of piezoelectric micromotors are presented in this paper, and the experiments show that the principle is useful in improving the energy output of piezoelectric micromotors.
出处
《光学精密工程》
EI
CAS
CSCD
1998年第1期58-64,共7页
Optics and Precision Engineering
基金
国家科委863
攀登计划资助项目
关键词
压电
微电机
微机器人
优化理论
计算机仿真
Piezoelectric micromotor, MEMS, Optimization principle, Computer simulation
