摘要
研究利用一种步进电机和光电转换装置组成的测试系统测量大功率半导体激光器发散角的方法。根据使用要求选择合适的探测元件，设计了测试系统。以波长950 nm，阈值电流200 mA，功率为900 mW的大功率半导体激光器为实验对象，结果显示，发散角测试精度可达到0.1°。在860-1 064 nm波长范围内多次实验，验证了该方法具有的实用精度要求。分析了发散角测量的影响因素。
A method for measuring the divergence angle of high power semiconductor laser by a step-run motor and a photoelectric transform device was studied. The proper detector was selected according to the request and the test system was designed. The measuring precision is 0.1°, it is obtained by an experiment upon a high power semiconductor that 2 is 950 nm, the threshold current is 200 mA and the power is 900 mW. Lots of test experiments were made within wave band of 860- 1 064 nm, which validated the utility precision request of this method. The influence factors of divergence angle measurement were analyzed.
出处
《半导体技术》
CAS
CSCD
北大核心
2009年第1期62-64,共3页
Semiconductor Technology
关键词
发散角测量
大功率半导体激光器
探测器
误差
divergence angle measurement
high power semiconductor laser
detector
error
