摘要
以玻璃为基片的微流控芯片在制备方面存在制作成本偏高及加工周期较长等问题.本研究以廉价的载玻片为微流控芯片基片材料,以铬膜为牺牲层,通过优化光刻和湿法刻蚀工艺,得出较为优异的湿法刻蚀条件,制备出了较佳结构的玻璃微沟道.将其与PDMS进行不可逆封接后,获得了玻璃-PDMS芯片.该工艺简单,且有效地降低了芯片的制作成本.电渗性能测试结果表明,该芯片电渗性能稳定、良好.
There are many problems on the preparation of micro-fluidic chip with the slide glass as substrate, such as the high manufacture cost and the long-producing cycle. After optimizing lithography and wet-etching techniques, the glass channel with the slide glass as the substrate material was made. Then the glass with channel was sealed with poly（dimethylsiloxane） PDMS and received the glass/ PDMS micro-fluidic chips at last. This method was easy and also could decrease the fabricating cost. The result of electroosmosis study shows that the performance of this chip was steady and great.
出处
《武汉工程大学学报》
CAS
2009年第1期58-61,共4页
Journal of Wuhan Institute of Technology
基金
国家自然科学基金(50572075)
武汉市科技攻关项目(200710421119)
武汉工程大学研究生创新基金资助
关键词
微流控芯片
PDMS
电渗
电泳
micro-fluidic chips
PDMS
electroendosmosis
electrophoresis
