摘要
采用垂直蒸镀的方法,在接近室温的基底上,以较低的沉积速率(R(?)5(?)/S),连续调节通入真空室内的氧气压强PO_2,成功地蒸镀出性能优良的Co-CoO垂直磁化膜。其磁特性完全适用于作垂直磁记录介质。与高沉积速率的蒸镀相比,仅是适于产生垂直磁化膜的氧气压强PO_2的范围小些,薄膜磁特性和微结构对PO_2的变化较敏感,需要更精细地控制PO_2的数值。通过X射线衍射分析和透射电镜观察薄膜表面的复形表明:具有最佳磁特性的垂直磁化膜是hcp Co和fcc CoO的混合物,并形成以Co为中心,外面包围着CoO的柱状结构。当PO_2≥1.5×10^(-4)乇时,膜中出现了极少量钴的高价氧化物(如Co_2O_3,Co_3O_4),则形成以CoO为中心的CoO-Co-CoO相间的内外三层的柱状结构。此时薄膜的Ms变得较小,矫顽力H_(c⊥)和H_(c∥)也减小,磁特性开始变坏。
Perpendicular magnetization Co-CoO thin film with excellent magnetic properties is prepared by vertical evaporating on the substrate near room temperature. During the evaporation, the oxygen pressure PO2 input to the vacuum chamber could be continuously controled and a low deposition rate (R=5A/S) is maintained. The magnetic properties of the thin film are excellent for perpendicular magnetic recording medium. Only the range of PO2, which suits under the lower rate for preparing perpendicular magnetization thin film is smaller than that under the higher rate, and needs more carefully on controlling PO2. X-ray diffraction analysis and transmission electron micrograph of the carbon replica of the thin film surface shown: perpendicular magnetization thin film with optimum magnetic properties is a mixture of hcp Co and fcc CoO, with columnar structure composed of hcp Co surrounded by fcc CoO. When PO2 = 1.5×10-4 Torr, a few oxide of higher valence cobalt appeared in the film, and columnar layered CoO-Co-CoO structure is formed. Then saturation magnetization Ms and coercivity Hc⊥, Hc//are all become smaller, magnetic properties begin to deteriorate.
出处
《北京大学学报（自然科学版）》
CAS
CSCD
北大核心
1989年第1期110-116,共7页
Acta Scientiarum Naturalium Universitatis Pekinensis
关键词
垂直磁化溥膜
磁特性
磁记录介质
Co-CoO perpendienlar magnetization thin film
perpendicular magnetic recording medium
magnetic properties
microstructure
