摘要
自旋阀结构的发现为磁电子学以及磁传感器的研究揭开了新的一页。基于自旋阀结构的磁传感器由于具有灵敏度高、功耗小、高集成度等优点,因此在传感器工业中具有广泛的应用前景。本文介绍了基于自旋阀结构的磁传感器的研究方法。首先介绍了自旋阀结构及其特性,然后介绍了基于自旋阀结构的磁性薄膜的制备方法和结构优化,其次介绍了基于自旋阀薄膜的磁传感器芯片的制造工艺,最后介绍了基于惠斯通电桥结构的自旋阀磁传感器芯片。
Since the spin valve structure was found, the study of magnitoelectronics and magnetic sensors came to a new stage in the history. As magnetic sensors based on spin valve structure have high sensitivity, low power consumption and high integration, they will be widely used in sensor industry. In this paper, the way of research on the magnetic sensors based on spin valve structure is introduced. Firstly, the spin valve structure and its characteristic are introduced. Secondly, the preparation and optimization of magnetic film based on spin valve structure are introduced. Thirdly, the fabrication of magnetic sensor chip based on spin sensor chip based on Wheatstone bridge structure is introduced. valve film is introduced. Finally, spin valve magnetic
出处
《中国集成电路》
2008年第12期66-69,共4页
China lntegrated Circuit
