摘要
采用液相沉积法，在ITO玻璃上直接沉积出具有光催化活性的纳米TiO2薄膜。用XRD、AFM、UV—Vis对TiO2薄膜的物相、形貌、透明性和厚度等进行表征，并研究了TiF6^2-水溶液的浓度、反应物TiF6^2-和H3BO3的摩尔比、沉积时间等对沉积TiO2薄膜的结构和性能的影响。此外，还用亚甲基蓝的降解评价了TiO2薄膜的光催化活性。
Nano-TiO2 thin fihns with photoeatalytic activities were prepared via liquid-phase deposition （LPD） method. Effect of TiF6^2- concentration, TiF6^2-/ H3BO3 （tool） and deposition time on the surface structure and performance of deposited thin films were investigated. The transparence, thickness, crystal structure and image of the deposited films were characterized by XRD, AFM, and UV-Vis. Photocatalytic activity of the TiO2 thin films were evaluated by degradation of methylene blue .
基金
深圳市科技计划项目（编号：200219）
关键词
液相沉积
TIO2薄膜
光催化
锐钛矿型
liquid phase deposition
TiO2 thin fihn
photocatalysis
anatase
