摘要
激光具有波长选择范围宽，强度高和方向性好等优点，已在许多科学技术领域发挥了重要的作用。近年来，激光又被用于分子束外延（MBE）技术中，并取得了很大进展。本文论述了在MBE薄膜生长中，激光气体离化原位分子束组分监测，激光溅射产生外延分子束源以及这些新技术在材料生长中的应用。
?Lasers have played a very important role in the areas of many sciences and technology, because of the advantage of wide spectrum, high output density and excellent directivity. Recent, lasers find a new application in molecular beam epitaxy (MBE ) and make traditional MBE performances improved. In this paper, MBE flux monitoring using laser gas ionization and generation of molecular beams with the laser sputting are presented.
出处
《激光与红外》
CAS
CSCD
北大核心
1997年第4期228-230,共3页
Laser & Infrared
