摘要
考察了硅微粉在空气、水、聚乙二醇(PEG)以及PEG水溶液几种介质中的氧化行为,并分析比较了两种不同切割过程所产生的硅微粉屑的氧化情况。结果显示:200℃下干燥空气中硅微粉不发生明显氧化;在高于80℃的水中放置10d,硅微粉发生明显氧化,形成非晶SiO2。与水及水溶液相比,PEG能在一定程度上阻止硅微粉的氧化。另外,带锯切割中产生的硅微粉屑氧化严重,而多线切割中产生的硅微粉切屑无明显氧化。
The oxidation behaviors of silicon fine powder in several mediums, including air, water, PEG and aqueous solution of PEG, were studied. And the oxidation conditions of silicon fine powder sawdust formed in two different cutting processes were analyzed and compared. The results show that no obvious oxidation occurs in silicon fine powder in dry air at 200℃. When placed in water at above 80 ℃ for 10 days, oxidation would happen obviously and amorphous SiO2 would form for the silicon fine powder. Compared with water and aqueous solution, PEG can prevent the silicon fine powder from oxidation to some extent. And serious oxidation of the silicon fine powder sawdust occurs in the band sawing, while no obvious oxidation of the silicon fine powder sawdust occurs in the multi-wire sawing.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2008年第10期41-44,共4页
Electronic Components And Materials
关键词
无机非金属材料
硅晶体
微粉
氧化
太阳能
non-metallic inorganic material
silicon crystal
fine powder
oxidation
solar energy
