摘要
本文介绍了一种新型电子冷却技术—微型电液动力泵的工作原理,并且运用了MEMS技术,在硅片上加工了梳状电极形式的微型电液动力泵.采用直流电压驱动对HFE7100进行了相关实验研究,取得良好效果.
In this paper, a novel electronics cooling technology-electrohydrodynamic （EHD） micropump was introduced. The EHD micropump with comb electrodes was fabricated using the technology of MEMS. The system performance has been tested driven by DC voltage and using HFE7100 as work fluid. Comparing to foreign researches,test has improved results.
出处
《工程热物理学报》
EI
CAS
CSCD
北大核心
2008年第10期1743-1745,共3页
Journal of Engineering Thermophysics
基金
国家自然科学基金(No.50676001)
关键词
电子冷却
微型电液动力泵
传热
electronics cooling
electrohydrodynamic pump（EHD pump）
heat transfer
