摘要
介绍了声表面波气体传感器的基本结构和研究进展,指出了其存在的主要问题及解决方法:如温度控制电路可解决温度的影响;仿钻结晶碳覆盖层可解决湿度影响;人工神经网络技术可解决响应时间;监视声表面波的频率和振幅在高次谐波下的变化,可解决在低浓度工作时的灵敏度等问题。展望了声表面波气体传感器的发展趋势,认为该传感器的研究价值很高,市场前景广阔。
The basic structure and research progress of SAW gas sensors were introduced. The major problems of current SAW gas sensors were pointed out and the corresponding solving methods were summarized. For instance, temperature influence problem can be solved by a temperature control circuit; humidity influence problem can be solved by diamond-like-carbon coating; response time problem can be solved by artificial neural network techniques; sensitivity problem at low gas concentrations can be solved by monitoring frequency and amplitude changes of SAW at a higher harmonic. The development trend of SAW gas sensors was prospected, believing this sort of sensor has significant value in research and broad future in market.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2008年第9期26-30,共5页
Electronic Components And Materials
