摘要
用化学机械抛光法加工掺钕钇铝石榴石(Nd:Y3Al5O12,Nd:YAG)透明陶瓷。为了提高加工效率,在研磨阶段逐步减小B4C磨料的粒径,精密研磨和抛光阶段采用粒度为3,1μm和0.3μm氧化铝粉;最后,选用胶体二氧化硅作为抛光液进行化学机械抛光,以获得更好的表面光洁度。采用Wkyo 激光干涉仪测量加工样品的平面度,光学显微镜观察表面宏观损伤,原子力显微镜测量表面粗糙度和微观形貌。结果表明:采用该工艺可实现高效率、高精度Nd:YAG 透明陶瓷的超精密加工,加工后的 Nd:YAG 陶瓷表面粗糙度<0.2nm RMS(root mean square),平面度<λ/10 (λ=633 nm),微观损伤少。
Transparent neodymium-doped yttrium aluminum garnet （Nd：YAG） ceramics were machined with ultra-precision by the chemical mechanical polishing method. In order to improve the machining efficiency, first, the size of B4C abrasive particles was continually decreased during a rough grinding process. Then, Al2O3 abrasives with the size of 3, 1 and 0.3 μm were utilized for preci- sion lapping and polishing and colloidal SiO2 slurry was selected as the polishing agent to get a better degree of surface fineness and surface quality. The surface morphology of the Nd：YAG ceramic sample was examined using a Nikon optical microscope. The surface roughness of the sample was determined using an atomic force microscope. The flatness of the sample was tested using a Wyko RTI 4100 laser interferometer. The results show that the Nd：YAG ceramics can be machined using the method for high efficiency and high precision to obtain a surface with high quality, with a flatness less than λ/10 （λ=633 nm）, a mean roughness less than 0.2 nm root mean square （RMS）, very few micro scratches and little damage.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2008年第8期1178-1182,共5页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金(50675104)
江苏省六大人才高峰基金(06-D-024)
南京航空航天大学引进人才基金(S0782-052) 资助项目
关键词
掺钕钇铝石榴石陶瓷
表面
化学机械抛光
粗糙度
平面度
neodymium-doped yttrium aluminum garnet ceramics
surface
chemical mechanical polishing
roughness
flatness
