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Characterization of Nitrogen Glow Discharge Plasma via Optical Emission Spectrum Simulation 被引量:1

Characterization of Nitrogen Glow Discharge Plasma via Optical Emission Spectrum Simulation
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摘要 Optical emission spectroscopy in nitrogen glow discharge plasma is simulated, and the collision excitations and characteristic emissions of the species (N2, N2^+, N^+, N) are investigated by a Monte Carlo model for nitrogen molecular gas discharge. The excitation rates of the main excited states are calculated and the corresponding relation and relative magnitude between the distribution of excitation rate of a certain excited state and the distributions of the emission rates of various lines originating from this excited level are also explored. The simulated results are compared with the experimental measurements in two typical discharge conditions. The luminescence mechanism of the line N2^+: 391.4 nm is explained based on the microscopic plasma processes. The cathode glow in N2 discharge is found to be mainly caused by N^+ impact excitation and the intensity of cathode glow decreases with the voltage. The corresponding relation between the emission rate or intensity of the 391.4 nm line and the production rate and the density of N2^+ is also examined. Optical emission spectroscopy in nitrogen glow discharge plasma is simulated, and the collision excitations and characteristic emissions of the species (N2, N2^+, N^+, N) are investigated by a Monte Carlo model for nitrogen molecular gas discharge. The excitation rates of the main excited states are calculated and the corresponding relation and relative magnitude between the distribution of excitation rate of a certain excited state and the distributions of the emission rates of various lines originating from this excited level are also explored. The simulated results are compared with the experimental measurements in two typical discharge conditions. The luminescence mechanism of the line N2^+: 391.4 nm is explained based on the microscopic plasma processes. The cathode glow in N2 discharge is found to be mainly caused by N^+ impact excitation and the intensity of cathode glow decreases with the voltage. The corresponding relation between the emission rate or intensity of the 391.4 nm line and the production rate and the density of N2^+ is also examined.
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第4期455-462,共8页 等离子体科学和技术(英文版)
基金 Natural Science Foundation of Hebei Province of China(Nos.A2006000123,F2006000183)
关键词 nitrogen glow discharge optical emission spectroscopy Monte Carlo simulation nitrogen glow discharge, optical emission spectroscopy, Monte Carlo simulation
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