摘要
大气压离子质谱(API-MS)法以其高灵敏度及特效性,特别适合于分析高纯气体中的痕量物质。我们用API-MS法对高纯氮中的痕量氧进行了定量分析,结果表明,测量灵敏度达1×10-9mol/mol,而测量精度优于±10%。文中介绍了有关的取样技术及定量方法,并讨论了高纯氮中的H2O。
With high sensitivity and specificity, the method of air pressure ionic mass spectrum (API MS) is suitable for measurements of trace materials in high purity gases. We have quantitatively analyzed the trace oxygen in high purity nitrogen by means of API MS. The results show that the measurement sensitivity reaches 1×10 -9 mol/mol with accuracy better than ±10%. The relevant sampling techniques and quantitative methods are described in this paper, and the influence of oxy compounds in high purity nitrogen, such as H 2O, CO 2 and NO, on oxygen measurement are discussed.
出处
《现代计量测试》
1997年第2期42-46,共5页
Modern Measurement and Test
关键词
大气压离子质谱
高纯氮
痕量氧
API-MS
Air Pressure Ionic Mass Spectrum, High Purity Nitrogen, Trace Oxygen.