摘要
类金刚石薄膜是一种很好的红外窗口表面增透保护材料,随着对其抗激光损伤特性研究的不断深入,越来越多的研究者都将研究的重点放在了如何提高其激光损伤阈值上。然而,不同沉积方法制备的薄膜由于其微观结构存在的差异,必然会导致破坏的过程有所不同。本文采用非平衡磁控溅射技术沉积的薄膜,对其损伤过程进行了深入的研究。结果表明:在不同的激光能量下,DLC薄膜出现不同的损伤形态,而这些与薄膜的缺陷、内应力以及薄膜与衬底的结合力密切相关。
The diamond-like carbon（DLC） films were grown by unbalanced magnetron sputtering on p-type Si（100） substrates. The influcence of various factors, including laser energy density, intrinsic defects of the films, its stress distributions and the interracial adhesion, on laser induced damages of the DLC films were experimentally studied. The results show that the laser energy significantly affects the morphologies of the laser induced damages, such as heating up, light ablation, peeling off, heavy ablation and melting. Besides, the geometries of the damages also depend on the defect densities, stress and the interracial adhesion of the films to a varying degree. Possible mechanisms were also tentatively explained.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2008年第4期337-340,共4页
Chinese Journal of Vacuum Science and Technology
基金
陕西省基金资助项目(No.2007K07-17)
西安市科技计划项目(No.YF07051)
关键词
类金刚石薄膜
非平衡磁控溅射
激光损伤
损伤形态
Diamond-like carbon films, Unbalanced magnetron sputtering, Laser-damge, Damage morphology
