摘要
对微型磁通门传感器的原理与结构进行论述,介绍了平面型和立体型微型磁通门传感器的制备方法,并阐述了A/D转换、Δ-Σ调制和全数字化磁通门传感器测试系统的组成和结构,指出现有测试系统的优缺点和存在问题,并在此基础上分析了微型磁通门传感器的发展趋势。
Principle and structure of the micro-fluxgate sensors were introduced. Fabrication technology of planar and three- dimensional sensors was described. Compositions and structures of A/D convert, △-∑ modulation and fully digital micro-fluxgate sensors testing system were introduced. Advantage, disadvantage and existed problems of the testing system were pointed out. And the main tendency of micro-fluxgate sensors was analyzed based on the former discussion.
出处
《仪表技术与传感器》
CSCD
北大核心
2008年第6期9-11,15,共4页
Instrument Technique and Sensor
关键词
磁通门
传感器
制备
测试
fluxgate
sensors
fabrication
testing
