摘要
电阻率为15～20Ωcmn型单晶硅在氢氟酸-乙醇溶液中通过光电化学阳极氧化刻蚀后,再经过光氧化处理得到稳定化的多孔硅(porous silicon,PS).在PS结构基础上通过真空蒸镀金属铝(Al)层形成Al/PS/Si/Al纵向结构和PS两端镀铝的Al-PS-Al横向结构.利用多孔硅高比表面积对不同浓度尿素进行吸附后,得到Al/PS-urea/Si/AlorAl-PS-urea-Al结构.研究了上述两种结构的电流电压的半对数关系,结果表明lgI～V曲线与被吸附尿素的含量呈递减关系,浸泡PS的尿素溶液浓度在1μg.ml-1～1mg.ml-1范围内呈线性递减关系.基于这两种结构的多孔硅器件有望实现对尿素的传感.
Porous silicon（PS） was formed by etching n type silicon wafer with a resistivity of 15 - 20 12 cm in ethanol- hydrogen fluoride solution. The formed PS was stabilized by illumination oxidation in hydrogen chloride solution. Aluminum was evaporated onto the PS to form longitudinal structure, Ai/PS/Si/Al and transversal structure Al- PS - Al. Urea was absorbed into the PS nanostructum in different concentrations to form Al/PS - urea/Si/Al or Al/PS - urea/Al. Electrical characteristics of the Al/PS - ureaJSi/Al or Al - PS - urea - Al was investigated by measuring lgⅠ～ V . It has been found that the lgI decreases with the absorbed urea content and there is a linear relation in the range of 1μg ml^-1 ～ 1mg ml^-1 urea solution used to immerse the PS. Accordingly, PS - based two structures were potential to develope biomolecules sensors.
出处
《山东师范大学学报（自然科学版）》
CAS
2008年第3期78-80,共3页
Journal of Shandong Normal University(Natural Science)
基金
国家自然科学基金资助项目(60671010)
山东省自然科学基金资助项目(Y2006B29)
关键词
多孔硅
尿素
光电化学
传感器
porous silicon
urea
photoelectrochemistry
biomolecule sensor
