摘要
设计了一种测量X射线光源焦斑尺寸的方法:多毛细管准直器法。整体玻璃毛细管X射线准直器是由数105根内径为几微米的单玻璃毛细管组成的X射线光学器件,X射线光源发出的发散X射线光束被多毛细管准直器约束后变为准平行束。准平行束的截面直径是X射线光源焦斑直径的函数,通过测量准平行束不同位置处的截面直径,利用线性拟合可得到X射线光源的焦斑直径。分别利用多毛细管准直器法和常用的小孔成像法测量了同一微焦斑X射线光源的焦斑直径,测量结果分别为60.8和59.4μm。多毛细管准直器法对焦斑直径在亚微米量级或更小X射线源的焦斑尺寸测量中将显示出更多的优势。
The method of measuring the focal spot size of X-ray source was designed by using a monolithic glass polycapillary X-ray collimator （MGPXRC）. The MGPXRC is composed of 105 capillaries with an inner diameter of several microns. The divergent X-ray beam emitted from X-ray source became a quasi-parallel beam after collimated by MGPXRC. The quasi-parallel beam size is related to the focal spot size of X-ray source. Therefore, the focal spot size of X-ray source can be obtained by using the linear fit based on the quasi-parallel beam size at various distance from the output of the MGPXRC. The focal spot size of a micro X-ray source was measured by using the MGPXRC method and conventional pinhole imaging method, and the measured results are 60.8 and 59.4 μm, respectively. The MGPXRC can be used to measure the focal spot size of X-ray source with a larger emitting angle than the critical angle of the total reflection of X-rays. And the MGPXRC method has a potential application in the measurement of X-ray source with a spot size of a submicron or even smaller.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2008年第7期633-636,共4页
Atomic Energy Science and Technology
基金
应用光学北京市重点实验室建设资助项目(JD100270543)
2008年度教育部科学技术研究重点项目:高品质X光器件的研究(108125)
北京师范大学青年科学基金资助项目(104983)
