摘要
提出和建立了基于白光干涉的自稳定定量相位成像系统。该系统以柯勒照明的白光迈克耳孙干涉计为基础,使用自稳定锁相电路以减少相位噪音,引入相移装置获得定量的相位图像。实验分别以平面镜、标准测试图和聚苯乙烯小球为样品,获得了清晰的定量相位图像,实现了对样品的实时观测。该装置采用卤素灯照明,达到轴向分辨力5 nm,系统中的柯勒照明结构使其具有高空间相干性。实验结果表明,该装置能有效避免系统中其他光学表面(如系统中的透镜表面)干扰信号的影响。
A novel self-stable quantitative phase imaging system, based on a white light Michelson interferometer with Kohler illumination is reported. An actively stabilized phase-lock circuit is employed in the system to reduce phase noise. A phase-shifting technique is used to obtain quantitative phase images of the sample. Mirror, standard negative test chart and polystyrene beads are used as samples in experiments. Clear quantitative phase images are obtained and real-time observation is realized. The system uses halogen lamp as the light source and the vertical resolution of 5 nm is obtained. The structure of Kohler illumination in the system ensures high spatial coherence. Experimental results show this system can get rid of the interfering signal from other optical surfaces, such as lens surfaces.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2008年第7期1279-1282,共4页
Acta Optica Sinica
基金
国家863计划(2006AA04Z237)
国家自然科学基金(50775205)资助课题
关键词
白光干涉
定量相位成像
迈克耳孙干涉
柯勒照明
自稳定
white-light interference
quantitative phase imaging
Michelson interferometer
Kohler illumination
active stabilization
