摘要
给出由重叠反冲能谱计算氢和氘的浓度及深度分布的解谱技术。用4.5MeV和4.2MeV的α粒子作入射粒子得到两个反冲能谱,在考虑和不考虑能量展宽效应的情况下分析了钛膜中氢和氘的深度分布;发现考虑能量展宽效应的影响得到的氢和氘的深度分布是令人满意的。
? By means of a new spectrum-stripping method, depth profiling of hydrogen and deuterium absorbed in titanium film has been performed using two recoil spectra obtained at different incident 4He++ energies (42MeV and 45MeV) with and without considering the energy spread effect Satisfactory depth profiles of hydrogen and deuterium have been achieved when the energy spread effect is considered
出处
《核技术》
EI
CAS
CSCD
北大核心
1997年第10期611-614,共4页
Nuclear Techniques
关键词
弹性反冲分析
深度分布
深度分辨率
氢
氘
薄膜
Elastic recoil detection analysis, Depth profiling, Depth resolution