期刊文献+

采用弹性反冲分析法同时测量薄膜中氢和氘的深度分布 被引量:1

Depth profiling of hydrogen and deuterium in films by ERDA
下载PDF
导出
摘要 给出由重叠反冲能谱计算氢和氘的浓度及深度分布的解谱技术。用4.5MeV和4.2MeV的α粒子作入射粒子得到两个反冲能谱,在考虑和不考虑能量展宽效应的情况下分析了钛膜中氢和氘的深度分布;发现考虑能量展宽效应的影响得到的氢和氘的深度分布是令人满意的。 ? By means of a new spectrum-stripping method, depth profiling of hydrogen and deuterium absorbed in titanium film has been performed using two recoil spectra obtained at different incident 4He++ energies (42MeV and 45MeV) with and without considering the energy spread effect Satisfactory depth profiles of hydrogen and deuterium have been achieved when the energy spread effect is considered
出处 《核技术》 EI CAS CSCD 北大核心 1997年第10期611-614,共4页 Nuclear Techniques
关键词 弹性反冲分析 深度分布 深度分辨率 薄膜 Elastic recoil detection analysis, Depth profiling, Depth resolution
  • 相关文献

参考文献3

  • 1宋世战,兰州大学学报,1992年,28卷,4期,64页 被引量:1
  • 2任孟眉,核技术,1991年,14卷,10期,8页 被引量:1
  • 3Wang Hong,Nucl Instrum Methods B,1988年,34卷,145页 被引量:1

同被引文献8

  • 1李宏发,翟国良.SIMS对氘靶钛膜中氘的分布研究[J].原子能科学技术,1996,30(1):65-68. 被引量:3
  • 2WIELUNSKI L,BENENSON R,HORN K,et al.High sensitivity hydrogen analysis using elastic recoil[J].Nuclear Instruments and Methods in Physics Research,1986,B15:469-474. 被引量:1
  • 3TSUCHYA B,TESHIGAWARA M.Hydrogen analyses of titanium hydride by ERD and NRG methods[J].Nuclear Instruments and Methods in Physics Research,2002,B190:699-703. 被引量:1
  • 4ISHIGAMI R,ITO Y,YASUDA K,et al.Transmission ERDA measurement of deuterium in titanium with thickness ~70 μm using 15 MeV 4 He beams[J].Nuclear Instruments and Methods in Physics Research,2002,B194:257-268. 被引量:1
  • 5CALLIGARO T,CASTAING J,DRAN J C,et al.ERDA with an external helium ion microbeam:Advantages and potential applications[J].Nuclear Instruments and Methods in Physics Research,2001,B181:180-185. 被引量:1
  • 6BROWNING J F,LANGLEY R A,DOYLE B L,et al.High accuracy,high energy He-ERD analysis of H,D and T[J].Nuclear Instruments and Methods in Physics Research,2000,B161-163:211-215. 被引量:1
  • 7BROWNING J F,BANKS J C,WAMPLER W R,et al.Cross-sections for the elastic recoil of hydrogen isotopes for high energy helium ions[J].Nuclear Instruments and Methods in Physics Research,2004,B219-220:317-322. 被引量:1
  • 8SAWICKI J A.Tritium implantation and depth profiling in fusion related material[J].Nuclear Instruments and Methods in Physics Research,1987,B23:521-526. 被引量:1

引证文献1

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部