摘要
大离轴抛物面镜的加工与检测是当今光学加工的热门课题。本文介绍了为新加坡同步辐射光源研制的离轴抛物面镜,包括抛物面镜的加工与检测。该抛物面镜零件的特点是离轴量1米以上,倾斜度误差与表面粗糙度要求都很高。加工的最终倾斜度误差为1.55弧秒,粗糙度RMS为2.24纳米,达到国际同类镜的先进水平。
The Parabolic mirror with large Off-axis fabrication and testing is currently a hot topic on optical fabrication. The off-axis parabolic mirror is developed for the Singaporean synchrotron radiation light source development in this paper, in cluding Parabolic mirror fabrication and testing. The characteristics of the off-axis parabolic mirror element is more than one meter, slope error and surface roughness high requirements. The final slope error is 1.55 ＂, roughness RMS is 2.24 nm, similar mirror up to international advanced level.
出处
《长春理工大学学报（自然科学版）》
2008年第2期48-50,共3页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
长春光机所创新基金资助项目
关键词
抛物面镜
离轴
加工
检测
parabolic mirror
off-axis
fabrication
testing
