摘要
对振动式微机械陀螺的带宽特性进行了讨论,以设计的一种带解耦结构的振动式微机械陀螺为模型,利用数学工具软件MATLAB对其进行了带宽特性分析。分析结果表明,对于2自由度的陀螺,驱动频率的带宽不仅与驱动模态和检测模态的频率匹配有关,而且与两个模态的阻尼匹配有关。随着驱动模态和检测模态频率匹配的降低,带宽先增加然后基本保持不变。随着驱动和检测模态阻尼匹配的降低,带宽一直减小。通过实现驱动模态与检测模态的频率匹配和阻尼匹配可以获得最大机械灵敏度和最大驱动频率带宽。
The bandwidth characteristics of a micromachined vibratory gyroscope with decoupled structure are discussed. Based on a designed gyroscope model, the bandwidth characteristics are analyzed and simulated by utilizing the mathematics tool software MATLAB. The analysis results show that for a two degree of freedom gyroscope system, the bandwidth of diving frequency depends on not only the frequency match between drive and sense modes, but also the damping coefficients match between two modes. With the decrease of drive and sense modes match, the bandwidth increases firstly, and then keep constant. As the damping coefficients match decrease, the bandwidth decrease all long. The maximum sensitivity and bandwidth can be achieved by the means of modes match and damping match.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第2期337-340,共4页
Chinese Journal of Sensors and Actuators
关键词
微机械陀螺
微机电系统
带宽特性
模态匹配
阻尼匹配
micromachined gyroscope
MEMS
bandwidth characteristics
mode match
damping match
