摘要
电渗驱动微泵是一种新型的微泵,具有输出压强高、流量可调范围宽、结构简单、无活动部件等特点,易与微通道热沉集成,构成微通道冷却系统,可用于集成电路的热管理。本文介绍了电渗驱动微泵的数学模型,利用PB方程来描述电渗流中电势和离子分布,讨论了背压与流速的关系,槽道宽度、工作液体温度、外加电压等参数对电渗泵性能的影响。
The electroosmotic micropump is a novel pump which has the advantages of high pressure, a wide range of flow rate, simple structure and no moving part. The microchannel cooling system which can be used for integrated circuit thermal management is formed by the electroosmotic micropump and micaochannel. Mathematical model which adopted Poisson-Boltzmann equation to predict the distributions of the electric potential and the ions is introduced. Relationship between the back pressure and flow rate is discussed, and the effects of pump depth, fluid temperature and supply voltage on the pumping performance are also studied.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第2期219-221,共3页
Chinese Journal of Sensors and Actuators
基金
国防基础研究项目资助
武器装备预研资助项目(51305070402)
中国工程物理研究院科学技术发展基金资助项目
西南科技大学学校青年预研基金项目(07zx3114)
